Pembuatan Sistem Instrumentasi dan Kendali (SIK) Kevakuman dan Sistem Pewaktu Proses Nitridasi Plasma Menggunakan Super PLC T100MD1616+

https://doi.org/10.22146/ijeis.1965

Ashar Punto Nurwendo(1), Agus Harjoko(2*), Slamet Santosa(3)

(1) 
(2) 
(3) 
(*) Corresponding Author

Abstract


Abstrak

Bidang Teknologi Akselerator dan Fisika Nuklir (BTAFN) Pusat Teknologi Akselerator dan Proses Bahan (PTAPB) BATAN Yogyakarta mengembangkan mesin nitridasi plasma untuk menambah tingkat kekerasan permukaan logam dan meningkatkan ketahanan aus serta tahan korosi. Mesin nitridasi plasma tersebut masih dioperasikan secara manual.

Sistem Instrumentasi dan Kendali (SIK) Kevakuman dan Sistem Pewaktu Proses Nitridasi Plasma dibuat agar mesin nitridasi plasma dapat dioperasikan secara otomatis. Sistem instrumentasi dan kendali ini menggunakan Super PLC T100MD1616+ sebagai pusat kontrol dan terdiri dari sistem akuisisi data tekanan gas dan sistem kendali regulator gas N2. Sistem akuisisi data tekanan gas menggunakan sensor Pirani PRL 10 K dan Vacuum Meter Pirani 1001 untuk memantau perubahan tekanan gas di dalam bejana nitridasi plasma. Pengolahan data hasil akuisisi data tekanan gas dilakukan dengan menggunakan metode lookup table. Nilai tekanan gas yang dihasilkan oleh sistem akuisisi data tekanan gas digunakan sebagai umpan balik (feedback) untuk sistem kendali tekanan gas.Kendali tekanan gas diatur oleh regulator gas N2 dengan menggunakan stepper motor sebagai aktuator.

Sistem Instrumentasi dan Kendali Kevakuman dapat mengontrol kestabilan tekanan gas yang dibutuhkan pada proses nitridasi plasma. Sistem pewaktu proses digunakan untuk mengatur durasi proses nitridasi plasma. Dengan dibuatnya Sistem Instrumentasi dan Kendali (SIK) Kevakuman dan Sistem Pewaktu Proses Nitridasi Plasma, pengguna dimudahkan dalam mengoperasikan mesin dan dapat meningkatkan kualitas hasil proses nitridasi plasma.

Kata kunci Nitridasi Plasma, tekanan gas,  PLC, pirani, pengkondisi sinyal, stepper motor.

 

Abstract

Accelerator Technology and Nuclear Physics Division (BTAFN) of the Center for Accelerator Technology and Material Process (PTAPB) BATAN Yogyakarta develops plasma nitridation machinery to increase surface hardness, wear resistance and corrosion resistance of metal. The plasma nitridation machines are still operated manually.

Vaccum Control System (ICS) and Plasma Nitridation Process Timing System is developed in order for the plasma nitridation machine to operate automatically. The instrumentation and control system uses PLC Super T100MD1616 + as the central control, and consists of gas pressure data acquisition system and N2 gas pressure regulator control system. The gas pressure data acquisition system uses Pirani sensor PRL 10 K and Pirani 1001 Vacuum Meter to monitor gas pressure changes in the plasma nitridation vessel. Data processing of data from the data acquisition system used the lookup table method. The value of gas pressure generated by gas pressure data acquisition system is used as feedback for gas pressure control system. The control of gas pressure is set by the N2 gas regulator using stepper motor as actuators.

The Vaccum Instrumentation and Control System can control the stability of gas pressure which is needed in plasma nitridation process. The timing system process is used to set the duration of plasma nitridation process. The Vacuum Instrumentation and Control System (ICS) and the Timing System enbles the plasma nitridation process to operate automatically.

Keywords Plasma Nitridation, gas pressure, PLCs, pirani, signal conditioner, stepper motor.


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DOI: https://doi.org/10.22146/ijeis.1965

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