-, Sudjatmoko, Centre for Accelerator and Material Process Technology, BATAN, Jl. Babarsari Kotak Pos 6101 YKBB Yogyakarta 55281, Indonesia, Indonesia

• Vol 17, No 49 (2013) - Research Articles
  Effect of Substrate Temperature and Target-Substrate Distance on Growth of TiO2 Thin Films by Using DC- Reactive Sputtering Technique
  Abstract  PDF