CHARACTERIZATION OF NANO-STRUCTURES IN MATERIALS BY TRANSMISSION ELECTRON MICROSCOPY



Y. Tomokiyo(1*)

(1) Research Laboratory for High Voltage Electron Microscopy, Kyushu University Fukuoka 812-8581
(*) Corresponding Author

Abstract


We will introduce the usefulness of convergent beam electron diffraction (CBED) in nano-characterization of materials: (1) Determination of local lattice strain in Si, (2) Determination of polarity of GaN of wurtzite structure, (3) Measurement of local oxygen concentration of the high Tc superconductor YBa2Cu3Oy.

Keywords: convergent beam electron diffraction


Keywords


convergent beam electron diffraction

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ISSN 0215-9309 (Print)

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